High-resolution x-ray reflectivity study of thin layered Pt-electrodes for integrated ferroelectric devices
High-resolution x-ray reflectivity study of thin layered Pt-electrodes for integrated ferroelectric devices
The structural interface properties of layered Pt/Ti/SiO2/Si electrodes have been investigated using high-resolution specular and diffuse x-ray reflectivity under grazing angles. Currently this multilayer system represents a technological standard as bottom electrodes for ferroelectric thin-film applications. For the electronic and ferroelectric properties of integrated devices, the film-electrode interface is of …