Imaging mechanism of piezoresponse force microscopy in capacitor structures
Imaging mechanism of piezoresponse force microscopy in capacitor structures
The image formation mechanism in piezoresponse force microscopy (PFM) of capacitor structures is analyzed. We demonstrate that the spatial resolution is a bilinear function of film and top electrode thicknesses and derive the corresponding analytical expressions. For many perovskites, the opposite contributions of d31 and d33 components can result in …