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Deterministic integrated tuning of multicavity resonances and phase for slow-light in coupled photonic crystal cavities
We present the integrated chip-scale tuning of multiple photonic crystal cavities. The optimized implementation allows effective and precise tuning of multiple cavity resonances (up to ~1.60 nm/mW) and inter-cavity phase (~ 0.038 pi/mW) by direct local temperature tuning on silicon nanomembranes. Through designing the serpentine metal electrodes and careful electron-beam …