Electrically integrated SU-8 clamped graphene drum resonators for strain engineering
Electrically integrated SU-8 clamped graphene drum resonators for strain engineering
Graphene mechanical resonators are the ultimate two-dimensional nanoelectromechanical systems (NEMS) with applications in sensing and signal processing. While initial devices have shown promising results, an ideal graphene NEMS resonator should be strain engineered, clamped at the edge without trapping gas underneath, and electrically integratable. In this letter, we demonstrate fabrication …