Significance of the Casimir force and surface roughness for actuation dynamics of MEMS
Significance of the Casimir force and surface roughness for actuation dynamics of MEMS
Using the measured optical response and surface roughness topography as inputs, we perform realistic calculations of the combined effect of Casimir and electrostatic forces on the actuation dynamics of micro-electromechanical systems (MEMS). In contrast with the expectations, roughness can influence MEMS dynamics even at distances between bodies significantly larger than …