Low-damage high-throughput grazing-angle sputter deposition on graphene
Low-damage high-throughput grazing-angle sputter deposition on graphene
Despite the prevalence of sputter deposition in the microelectronics industry, it has seen very limited applications for graphene electronics. In this letter, we report systematic investigation of the sputtering induced damages in graphene and identify the energetic sputtering gas neutrals as the primary cause of graphene disorder. We further demonstrate …