Modeling of plume dynamics in laser ablation processes for thin film deposition of materials
Modeling of plume dynamics in laser ablation processes for thin film deposition of materials
The transport dynamics of laser-ablated neutral/plasma plumes are of significant interest for film growth by pulsed-laser deposition of materials, since the magnitude and kinetic energy of the species arriving at the deposition substrate are key processing parameters. Dynamical calculations of plume propagation in vacuum and in background gas have been …