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Stress-induced solid flow drives surface nanopatterning of silicon by ion-beam irradiation

Stress-induced solid flow drives surface nanopatterning of silicon by ion-beam irradiation

Ion Beam Sputtering (IBS) is known to produce surface nanopatterns over macroscopic areas on a wide range of materials. However, in spite of the technological potential of this route to nanostructuring, the physical process by which these surfaces self-organize remains poorly under- stood. We have performed detailed experiments of IBS …