Electron Beam Current Loss at the High-Vacuum– High-Pressure Boundary in the Environmental Scanning Electron Microscope
Electron Beam Current Loss at the High-Vacuum– High-Pressure Boundary in the Environmental Scanning Electron Microscope
Abstract A significant loss in electron probe current can occur before the electron beam enters the specimen chamber of an environmental scanning electron microscope (ESEM). This loss results from electron scattering in a gaseous jet formed inside and downstream (above) the pressure-limiting aperture (PLA), which separates the high-pressure and high-vacuum …