Modeling complex semiconductor fabrication processes such as Ohmic contact formation remains challenging due to high-dimensional parameter spaces and limited experimental data. While classical machine learning (CML) approaches have been successful in many domains, their performance degrades in small-sample, nonlinear scenarios. In this work, quantum machine learning (QML) is investigated as an alternative, exploiting quantum kernels to capture intricate correlations from compact datasets. Using only 159 experimental GaN HEMT samples, a quantum kernel-aligned regressor (QKAR) is developed combining a shallow Pauli-Z feature map with a trainable quantum kernel alignment (QKA) layer. All models, including seven baseline CML regressors, are evaluated under a unified PCA-based preprocessing pipeline to ensure a fair comparison. QKAR consistently outperforms classical baselines across multiple metrics (MAE, MSE, RMSE), achieving a mean absolute error of 0.338 Ω·mm when validated on experimental data. Noise robustness and generalization are further assessed through cross-validation and new device fabrication. These findings suggest that carefully constructed QML models can provide predictive advantages in data-constrained semiconductor modeling, offering a foundation for practical deployment on near-term quantum hardware. While challenges remain for both QML and CML, this study demonstrates QML's potential as a complementary approach in complex process modeling tasks.
This paper presents a novel approach to modeling complex semiconductor fabrication processes, specifically Ohmic contact formation in Gallium Nitride (GaN) High-Electron-Mobility Transistors (HEMTs), using quantum machine learning (QML). The significance of this work lies in addressing critical challenges in semiconductor manufacturing: the high-dimensional parameter space, nonlinear relationships, and crucially, the scarcity of experimental data due to the high cost and time involved in data collection. While classical machine learning (CML) struggles with small, nonlinear datasets, this research demonstrates that carefully constructed QML models can provide significant predictive advantages, paving the way for practical deployment on near-term quantum hardware.
The key innovation is the development of a Quantum Kernel-Aligned Regressor (QKAR). This hybrid quantum-classical model is designed to capture intricate correlations from compact datasets. Its architecture features a shallow Pauli-Z feature map that efficiently encodes classical data into quantum states, combined with a trainable Quantum Kernel Alignment (QKA) layer. The QKA layer is a significant aspect, as it allows the quantum kernel to be optimized and adapted to the specific regression task, enhancing its expressivity and leading to improved accuracy and stability. The paper rigorously benchmarks QKAR against seven widely used classical machine learning regressors (including SVM, Decision Tree, Gradient Boosting, XGBoost, AdaBoost, Deep Learning, and Elastic Net), consistently showing superior performance across multiple metrics (MAE, MSE, RMSE). Furthermore, the study includes robust validation through noise sensitivity analysis and, critically, by predicting the performance of newly fabricated devices, confirming QKARās generalization ability to unseen process settings. This experimental validation on physical samples, beyond just simulations, underscores the practical utility of the proposed QML approach.
The main prior ingredients needed for this work include: